- Sensor units are already calibrated when delivered to the site. Sensor units only need zero check and operation checks after being replaced, and they are ready to monitor gas consentration.
- Used sensor units are returned when obtaining new ones so they can be recycled.
- Sensor units and gas flow path can be replaced without tools.
- All functional parts are in modules for easy replacement.
- The Cosmos assists in reliable management of the timing for sensor unit and gas flow path replacement.
Gas Detected : Semiconductor manufacturing gases, hydrogen, oxygen etc
Detected Principle : Electrochemical cell, Hot wire semiconductor, Galvanic cell
Gas Concentration Indication : 4-digit LCD (with measuring unit), 20-step bad graph